Display of spectra contour plots versus time for semiconductor processing system control

ABSTRACT

A method to assist in identifying a spectral feature and a characteristic of the selected spectral feature to monitor during polishing includes polishing a test substrate and measuring a sequence of spectra of light reflected from a substrate while the substrate is being polished, where at least some of the spectra of the sequence differ due to material being removed during the polishing. The sequence of spectra are visually displayed as a contour plot.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to and is a continuation of U.S.application Ser. No. 14/626,147, filed on Feb. 19, 2015, which is acontinuation U.S. application Ser. No. 12/938,240, filed on Nov. 2,2010, which claims priority to U.S. Provisional Application Ser. No.61/257,688, filed on Nov. 3, 2009, each of which is incorporated byreference.

TECHNICAL FIELD

The present disclosure relates to optical monitoring during chemicalmechanical polishing of substrates.

BACKGROUND

An integrated circuit is typically formed on a substrate by thesequential deposition of conductive, semiconductive, or insulativelayers on a silicon wafer. One fabrication step involves depositing afiller layer over a non-planar surface and planarizing the filler layer.For certain applications, the filler layer is planarized until the topsurface of a patterned layer is exposed. A conductive filler layer, forexample, can be deposited on a patterned insulative layer to fill thetrenches or holes in the insulative layer. After planarization, theportions of the conductive layer remaining between the raised pattern ofthe insulative layer form vias, plugs, and lines that provide conductivepaths between thin film circuits on the substrate. For otherapplications, such as oxide polishing, the filler layer is planarizeduntil a predetermined thickness is left over the non planar surface. Inaddition, planarization of the substrate surface is usually required forphotolithography.

Chemical mechanical polishing (CMP) is one accepted method ofplanarization. This planarization method typically requires that thesubstrate be mounted on a carrier or polishing head. The exposed surfaceof the substrate is typically placed against a rotating polishing pad.The carrier head provides a controllable load on the substrate to pushit against the polishing pad. An abrasive polishing slurry is typicallysupplied to the surface of the polishing pad.

One problem in CMP is determining whether the polishing process iscomplete, i.e., whether a substrate layer has been planarized to adesired flatness or thickness, or when a desired amount of material hasbeen removed. Variations in the slurry distribution, the polishing padcondition, the relative speed between the polishing pad and thesubstrate, and the load on the substrate can cause variations in thematerial removal rate. These variations, as well as variations in theinitial thickness of the substrate layer, cause variations in the timeneeded to reach the polishing endpoint. Therefore, the polishingendpoint cannot be determined merely as a function of polishing time.

SUMMARY

In one aspect, a computer program product includes instructions toreceive an identification of a selected spectral feature and acharacteristic of the selected spectral feature to monitor duringpolishing. The computer program includes instructions to measure asequence of spectra of light reflected from a substrate while thesubstrate is being polished, where at least some of the spectra of thesequence differ due to material being removed during the polishing. Thecomputer program includes instructions to determine a value of acharacteristic of the selected spectral feature for each of the spectrain the sequence of spectra to generate a sequence of values for thecharacteristic. The computer program includes instructions to fit afunction to the sequence of values. The computer program includesinstructions to determine either a polishing endpoint or an adjustmentfor a polishing rate based on the function.

Implementations can include one or more of the following features. Theselected spectral feature can include a spectral peak, a spectralvalley, or a spectral zero-crossing. The characteristic can include awavelength, a width, or an intensity. The selected spectral feature canbe a spectral peak and the characteristic can be a peak width. Thecomputer program product can include instructions to determine apolishing endpoint by calculating an initial value of the characteristicfrom the function, calculating a current value of the characteristicfrom the function, and calculating a difference between the initialvalue and the current value, and ceasing polishing when the differencereaches a target difference.

In some implementations, the sequence of spectra of light can be from afirst portion of the substrate, and the computer program product canfurther include instructions to measure a second sequence of spectra oflight reflected from a second portion of the substrate while thesubstrate is being polished. The computer program product can includeinstructions for determining a value of the characteristic of theselected spectral feature for each of the spectra in the second sequenceof spectra to generate a second sequence of values for thecharacteristic, and fit a second function to the sequence of values. Thecomputer program product can include instructions for determining anadjustment for a polishing rate by calculating a first estimatedpolishing endpoint time for a first portion of the substrate using aslope of the first function, calculating a second estimated polishingendpoint time for a second portion of the substrate using a slope of thesecond function, and adjusting a polishing rate of the first or secondportion such that the first and second portions complete polishingcloser to the same time.

The function can be a linear function of time. When receiving anidentification, the computer program product can receive user input. Thecomputer program can include instructions for applying a high-passfilter to the spectra. The computer program product can includeinstructions for determining a polishing endpoint by calculating aninitial value of the characteristic from the function, calculating acurrent value of the characteristic from the function, calculating afirst difference between the initial value and the current value, andcalculating a second difference between the initial value and a targetvalue. The computer program product can include instructions to generatea weighted combination of the first difference and the seconddifference, and cease polishing when the weighted combination reaches atarget value.

In one aspect, a method of polishing includes polishing a substrate, andreceiving an identification of a selected spectral feature and acharacteristic of the selected spectral feature to monitor duringpolishing. The method includes measuring a sequence of spectra of lightreflected from the substrate while the substrate is being polished,where at least some of the spectra of the sequence differ due tomaterial being removed during the polishing. The method of polishingincludes determining a value of a characteristic of the selectedspectral feature for each of the spectra in the sequence of spectra togenerate a sequence of values for the characteristic, fitting a functionto the sequence of values, and determining either a polishing endpointor an adjustment for a polishing rate based on the function.

This and other embodiments can optionally include one or more of thefollowing features. The selected spectral feature can include a spectralpeak, a spectral valley, or a spectral zero-crossing. The characteristiccan include a wavelength, a width, or an intensity. The selectedspectral feature can be a spectral peak and the characteristic can be apeak width. The step of determining a polishing endpoint can includecalculating an initial value of the characteristic from the function,calculating a current value of the characteristic from the function, andcalculating a difference between the initial value and the currentvalue, and ceasing polishing when the difference reaches a targetdifference.

The sequence of spectra of light can be from a first portion of thesubstrate, and the method of polishing can further include measuring asecond sequence of spectra of light reflected from a second portion ofthe substrate while the substrate is being polished. The method ofpolishing can include determining a value of the characteristic of theselected spectral feature for each of the spectra in the second sequenceof spectra to generate a second sequence of values for thecharacteristic, and fitting a second function to the sequence of values.The step of determining an adjustment for a polishing rate can includecalculating a first estimated polishing endpoint time for a firstportion of the substrate using a slope of the first function,calculating a second estimated polishing endpoint time for a secondportion of the substrate using a slope of the second function, andadjusting a polishing rate of the first or second portion such that thefirst and second portions complete polishing closer to the same time.

The function can be a linear function of time. The step of receiving anidentification can include receiving user input. The method of polishingcan include applying a high-pass filter to the spectra. The step ofdetermining a polishing endpoint can include calculating an initialvalue of the characteristic from the function, calculating a currentvalue of the characteristic from the function, and calculating a firstdifference between the initial value and the current value, calculatinga second difference between the initial value and a target value. Thestep of determining a polishing endpoint can generate a weightedcombination of the first difference and the second difference, andceasing polishing when the weighted combination reaches a target value.

In one aspect, a method to assist in identifying a spectral feature anda characteristic of the selected spectral feature to monitor duringpolishing, includes polishing a test substrate. The method to assistincludes measuring a sequence of spectra of light reflected from asubstrate while the substrate is being polished, where at least some ofthe spectra of the sequence differ due to material being removed duringthe polishing. The method to assist includes visually displaying thesequence of spectra as a contour plot.

This and other embodiments can optionally include one or more of thefollowing features. The contour plot can include color coding ofintensity values. The contour plot can include a 3-D plot of intensityvalues.

Tracking changes in a characteristic of a feature of the spectrum, e.g.,a wavelength of a spectral peak, can allow greater uniformity inpolishing between substrates within a batch. Displaying a contour plot,e.g., a color-coded or 3-D contour plot, can make selection of apertinent feature by the user easier, since the features can be moreeasily visually distinguishable.

The details of one or more implementations are set forth in theaccompanying drawings and the description below. Other aspects,features, and advantages will be apparent from the description anddrawings, and from the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a chemical mechanical polishing apparatus.

FIG. 2 is an overhead view of a polishing pad and shows locations wherein-situ measurements are taken.

FIG. 3A shows a spectrum obtained from in-situ measurements.

FIG. 3B illustrates the evolution of spectra obtained from in-situmeasurements as polishing progresses.

FIG. 4A shows an example graph of a spectrum of light reflected from asubstrate.

FIG. 4B shows the graph of FIG. 4A passed through a high pass filter.

FIG. 5A shows a spectrum of light reflected from a substrate.

FIG. 5B shows a contour plot of spectra obtained from in-situmeasurements of light reflected from a substrate.

FIG. 6A shows an example graph of polishing progress, measured incharacteristic difference versus time.

FIG. 6B shows an example graph of polishing progress, measured incharacteristic difference versus time in which characteristics of twodifferent features are measured in order to adjust the polishing rate ofa substrate.

FIG. 7 shows a method for selecting a peak to monitor.

FIG. 8 shows a method for obtaining target parameters for the selectedpeak.

FIG. 9 shows a method for endpoint determination.

Like reference numbers and designations in the various drawings indicatelike elements.

DETAILED DESCRIPTION

One optical monitoring technique is to measure spectra of lightreflected from a substrate during polishing, and identify a matchingreference spectra from a library. One potential problem with thespectrum matching approach is that for some types of substrates thereare significant substrate-to-substrate differences in underlying diefeatures, resulting in variations in the spectra reflected fromsubstrates that ostensibly have the same outer layer thickness. Thesevariations increase the difficulty of proper spectrum matching andreduce reliability of the optical monitoring.

One technique to counteract this problem is to measure spectra of lightreflected off of substrates being polished and identify changes inspectral feature characteristics. Tracking changes in a characteristicof a feature of the spectrum, e.g., a wavelength of a spectral peak, canallow greater uniformity in polishing between substrates within a batch.By determining a target difference in the spectral featurecharacteristic, endpoint can be called when the value of thecharacteristic has changed by the target amount.

Spectral features can include spectral peaks, spectral valleys, spectralinflection points, or spectral zero-crossings. Characteristics of thefeatures can include a wavelength, a width, or an intensity.

FIG. 1 shows a polishing apparatus 20 operable to polish a substrate 10.The polishing apparatus 20 includes a rotatable disk-shaped platen 24,on which a polishing pad 30 is situated. The platen is operable torotate about axis 25. For example, a motor can turn a drive shaft 22 torotate the platen 24. The polishing pad 30 can be detachably secured tothe platen 24, for example, by a layer of adhesive. When worn, thepolishing pad 30 can be detached and replaced. The polishing pad 30 canbe a two-layer polishing pad with an outer polishing layer 32 and asofter backing layer 34.

Optical access 36 through the polishing pad is provided by including anaperture (i.e., a hole that runs through the pad) or a solid window. Thesolid window can be secured to the polishing pad, although in someimplementations the solid window can be supported on the platen 24 andproject into an aperture in the polishing pad. The polishing pad 30 isusually placed on the platen 24 so that the aperture or window overliesan optical head 53 situated in a recess 26 of the platen 24. The opticalhead 53 consequently has optical access through the aperture or windowto a substrate being polished.

The window can be, for example, a rigid crystalline or glassy material,e.g., quartz or glass, or a softer plastic material, e.g., silicone,polyurethane or a halogenated polymer (e.g., a fluoropolymer), or acombination of the materials mentioned. The window can be transparent towhite light. If a top surface of the solid window is a rigid crystallineor glassy material, then the top surface should be sufficiently recessedfrom the polishing surface to prevent scratching. If the top surface isnear and may come into contact with the polishing surface, then the topsurface of the window should be a softer plastic material. In someimplementations the solid window is secured in the polishing pad and isa polyurethane window, or a window having a combination of quartz andpolyurethane. The window can have high transmittance, for example,approximately 80% transmittance, for monochromatic light of a particularcolor, for example, blue light or red light. The window can be sealed tothe polishing pad 30 so that liquid does not leak through an interfaceof the window and the polishing pad 30.

In one implementation, the window includes a rigid crystalline or glassymaterial covered with an outer layer of a softer plastic material. Thetop surface of the softer material can be coplanar with the polishingsurface. The bottom surface of the rigid material can be coplanar withor recessed relative to the bottom surface of the polishing pad. Inparticular, if the polishing pad includes two layers, the solid windowcan be integrated into the polishing layer, and the bottom layer canhave an aperture aligned with the solid window.

A bottom surface of the window can optionally include one or morerecesses. A recess can be shaped to accommodate, for example, an end ofan optical fiber cable or an end of an eddy current sensor. The recessallows the end of the optical fiber cable or the end of the eddy currentsensor to be situated at a distance, from a substrate surface beingpolished, that is less than a thickness of the window. With animplementation in which the window includes a rigid crystalline portionor glass like portion and the recess is formed in such a portion bymachining, the recess is polished so as to remove scratches caused bythe machining. Alternatively, a solvent and/or a liquid polymer can beapplied to the surfaces of the recess to remove scratches caused bymachining. The removal of scratches usually caused by machining reducesscattering and can improve the transmittance of light through thewindow.

The polishing pad's backing layer 34 can be attached to its outerpolishing layer 32, for example, by adhesive. The aperture that providesoptical access 36 can be formed in the pad 30, e.g., by cutting or bymolding the pad 30 to include the aperture, and the window can beinserted into the aperture and secured to the pad 30, e.g., by anadhesive. Alternatively, a liquid precursor of the window can bedispensed into the aperture in the pad 30 and cured to form the window.Alternatively, a solid transparent element, e.g., the above describedcrystalline or glass like portion, can be positioned in liquid padmaterial, and the liquid pad material can be cured to form the pad 30around the transparent element. In either of the later two cases, ablock of pad material can be formed, and a layer of polishing pad withthe molded window can be scythed from the block.

The polishing apparatus 20 includes a combined slurry/rinse arm 39.During polishing, the arm 39 is operable to dispense slurry 38containing a liquid and a pH adjuster. Alternatively, the polishingapparatus includes a slurry port operable to dispense slurry ontopolishing pad 30.

The polishing apparatus 20 includes a carrier head 70 operable to holdthe substrate 10 against the polishing pad 30. The carrier head 70 issuspended from a support structure 72, for example, a carousel, and isconnected by a carrier drive shaft 74 to a carrier head rotation motor76 so that the carrier head can rotate about an axis 71. In addition,the carrier head 70 can oscillate laterally in a radial slot formed inthe support structure 72. In operation, the platen is rotated about itscentral axis 25, and the carrier head is rotated about its central axis71 and translated laterally across the top surface of the polishing pad.

The polishing apparatus also includes an optical monitoring system,which can be used to determine a polishing endpoint as discussed below.The optical monitoring system includes a light source 51 and a lightdetector 52. Light passes from the light source 51, through the opticalaccess 36 in the polishing pad 30, impinges and is reflected from thesubstrate 10 back through the optical access 36, and travels to thelight detector 52.

A bifurcated optical cable 54 can be used to transmit the light from thelight source 51 to the optical access 36 and back from the opticalaccess 36 to the light detector 52. The bifurcated optical cable 54 caninclude a “trunk” 55 and two “branches” 56 and 58.

As mentioned above, the platen 24 includes the recess 26, in which theoptical head 53 is situated. The optical head 53 holds one end of thetrunk 55 of the bifurcated fiber cable 54, which is configured to conveylight to and from a substrate surface being polished. The optical head53 can include one or more lenses or a window overlying the end of thebifurcated fiber cable 54. Alternatively, the optical head 53 can merelyhold the end of the trunk 55 adjacent the solid window in the polishingpad. The optical head 53 can be removed from the recess 26 as required,for example, to effect preventive or corrective maintenance.

The platen includes a removable in-situ monitoring module 50. Thein-situ monitoring module 50 can include one or more of the following:the light source 51, the light detector 52, and circuitry for sendingand receiving signals to and from the light source 51 and light detector52. For example, the output of the detector 52 can be a digitalelectronic signal that passes through a rotary coupler, e.g., a slipring, in the drive shaft 22 to the controller for the optical monitoringsystem. Similarly, the light source can be turned on or off in responseto control commands in digital electronic signals that pass from thecontroller through the rotary coupler to the module 50.

The in-situ monitoring module 50 can also hold the respective ends ofthe branch portions 56 and 58 of the bifurcated optical fiber 54. Thelight source is operable to transmit light, which is conveyed throughthe branch 56 and out the end of the trunk 55 located in the opticalhead 53, and which impinges on a substrate being polished. Lightreflected from the substrate is received at the end of the trunk 55located in the optical head 53 and conveyed through the branch 58 to thelight detector 52.

In one implementation, the bifurcated fiber cable 54 is a bundle ofoptical fibers. The bundle includes a first group of optical fibers anda second group of optical fibers. An optical fiber in the first group isconnected to convey light from the light source 51 to a substratesurface being polished. An optical fiber in the second group isconnected to receive light reflecting from the substrate surface beingpolished and convey the received light to the light detector 52. Theoptical fibers can be arranged so that the optical fibers in the secondgroup form an X-like shape that is centered on the longitudinal axis ofthe bifurcated optical fiber 54 (as viewed in a cross section of thebifurcated fiber cable 54). Alternatively, other arrangements can beimplemented. For example, the optical fibers in the second group canform V-like shapes that are mirror images of each other. A suitablebifurcated optical fiber is available from Verity Instruments, Inc. ofCarrollton, Tex.

There is usually an optimal distance between the polishing pad windowand the end of the trunk 55 of bifurcated fiber cable 54 proximate tothe polishing pad window. The distance can be empirically determined andis affected by, for example, the reflectivity of the window, the shapeof the light beam emitted from the bifurcated fiber cable, and thedistance to the substrate being monitored. In one implementation, thebifurcated fiber cable is situated so that the end proximate to thewindow is as close as possible to the bottom of the window withoutactually touching the window. With this implementation, the polishingapparatus 20 can include a mechanism, e.g., as part of the optical head53, that is operable to adjust the distance between the end of thebifurcated fiber cable 54 and the bottom surface of the polishing padwindow. Alternatively, the proximate end of the bifurcated fiber cable54 is embedded in the window.

The light source 51 is operable to emit white light. In oneimplementation, the white light emitted includes light havingwavelengths of 200-800 nanometers. A suitable light source is a xenonlamp or a xenon-mercury lamp.

The light detector 52 can be a spectrometer. A spectrometer is basicallyan optical instrument for measuring properties of light, for example,intensity, over a portion of the electromagnetic spectrum. A suitablespectrometer is a grating spectrometer. Typical output for aspectrometer is the intensity of the light as a function of wavelength.

The light source 51 and light detector 52 are connected to a computingdevice operable to control their operation and to receive their signals.The computing device can include a microprocessor situated near thepolishing apparatus, e.g., a personal computer. With respect to control,the computing device can, for example, synchronize activation of thelight source 51 with the rotation of the platen 24. As shown in FIG. 2,the computer can cause the light source 51 to emit a series of flashesstarting just before and ending just after the substrate 10 passes overthe in-situ monitoring module 50. Each of points 201-211 represents alocation where light from the in-situ monitoring module 50 impinged uponand reflected off of the substrate 10. Alternatively, the computer cancause the light source 51 to emit light continuously starting justbefore and ending just after the substrate 10 passes over the in-situmonitoring module 50.

The spectra obtained as polishing progresses, e.g., from successivesweeps of the sensor in the platen across the substrate, provide asequence of spectra. In some implementations, the light source 51 emitsa series of flashes of light onto multiple portions of the substrate 10.For example, the light source can emit flashes of light onto a centerportion of the substrate 10 and an exterior portion of the substrate 10.Light reflected off of the substrate 10 can be received by the lightdetector 52 in order to determine multiple sequences of spectra frommultiple portions of the substrate 10. Features can be identified in thespectra where each feature is associated with one portion of thesubstrate 10. The features can be used, for example, in determining anendpoint condition for polishing of the substrate 10. In someimplementations, monitoring of multiple portions of the substrate 10allows for changing the polishing rate on one or more of the portions ofthe substrate 10.

With respect to receiving signals, the computing device can receive, forexample, a signal that carries information describing a spectrum of thelight received by the light detector 52. FIG. 3A shows examples of aspectrum measured from light that is emitted from a single flash of thelight source and that is reflected from the substrate. Spectrum 302 ismeasured from light reflected from a product substrate. Spectrum 304 ismeasured from light reflected from a base silicon substrate (which is awafer that has only a silicon layer). Spectrum 306 is from lightreceived by the optical head 53 when there is no substrate situated overthe optical head 53. Under this condition, referred to in the presentspecification as a dark condition, the received light is typicallyambient light.

The computing device can process the above-described signal, or aportion thereof, to determine an endpoint of a polishing step. Withoutbeing limited to any particular theory, the spectrum of light reflectedfrom the substrate 10 evolves as polishing progresses. FIG. 3B providesan example of the evolution of the spectrum as polishing of a film ofinterest progresses. The different lines of spectrum represent differenttimes in the polishing. As can be seen, properties of the spectrum ofthe reflected light change as a thickness of the film changes, andparticular spectrums are exhibited by particular thicknesses of thefilm. When a peak (that is, a local maximum) in the spectrum ofreflected light is observed as the polishing of a film progresses, theheight of the peak typically changes, and the peak tends to grow wideras material is removed. In addition to widening, the wavelength at whicha particular peak is located typically increases as polishingprogresses. For example, peak 310(1) illustrates a peak in the spectrumat a certain time during polishing, and peak 310(2) illustrates the samepeak at a later time during polishing. Peak 310(2) is located at alonger wavelength and is wider than peak 310(1). The relative change inthe wavelength and/or width of a peak (e.g., the width measured at afixed distance below the peak or measured at a height halfway betweenthe peak and the nearest valley), the absolute wavelength and/or widthof the peak, or both can be used to determine the endpoint for polishingaccording to an empirical formula. The best peak (or peaks) to use whendetermining the endpoint varies depending on what materials are beingpolished and the pattern of those materials. In some implementations, achange in peak wavelength can be used to determine endpoint. Forexample, when the difference between the starting wavelength of a peakand the current wavelength of the peak reaches a target difference, thepolishing apparatus 20 can stop polishing the substrate 10.Alternatively, features other than peaks can be used to determine adifference in the wavelength of light reflected from the substrate 10.For example, the wavelength of a valley, an inflection point, or an x-or y-axis intercept can be monitored by the light detector 52, and whenthe wavelength has changed by a predetermined amount, the polishingapparatus 20 can stop polishing the substrate 10. In someimplementations, the characteristic that is monitored is the width orthe intensity of the feature instead of, or in addition to thewavelength. Features can shift on the order of 40 nm to 120 nm, althoughother shifts are possible, For example, the upper limit could be muchgreater, especially in the case of a dielectric polish.

FIG. 4A provides an example of a measured spectrum 400 a of lightreflected from the substrate 10. The optical monitoring system can passthe spectrum 400 a through a high-pass filter in order to reduce theoverall slope of the spectrum, resulting in a spectrum 400 b shown inFIG. 4B. During processing of multiple substrates in a batch, forexample, large spectra differences can exist among wafers. A high-passfilter can be used to normalize the spectra in order to reduce spectravariations across substrates in the same batch. An exemplary highpassfilter can have cutoff of 0.005 Hz and a filter order of 4. The highpassfilter is not only used to help filter out sensitivity to underlyingvariation, but also to “flatten” out the legitimate signal to makefeature tracking easier.

In order for a user to select which feature of the endpoint to track todetermine the endpoint, a contour plot can be generated and displayed tothe user. FIG. 5B provides an example of a contour plot 500 b generatedfrom multiple spectra measurements of light reflected off of thesubstrate 10 during polishing, and FIG. 5A provides an example of ameasured spectrum 500 a from a particular moment in the contour plot.The contour plot 500 b includes features, such as a peak area 502 and avalley area 504 which result from associated peaks 502 and valleys 504on the spectrum 500 a. As time progresses, the substrate 10 is polishedand the light reflected from the substrate changes, as shown by changesto the spectral features in the contour plot 500 b.

In order to generate the contour plot, a test substrate can be polished,and the light reflected from the test substrate can be measured by thelight detector 52 during polishing to generate a sequence of spectra oflight reflected from the substrate 10. The sequence of spectra can bestored, e.g., in a computer system, which optionally can be part of theoptical monitoring system. Polishing of the set up substrate can startat time T0 and continue past an estimated endpoint time.

When polishing of the test substrate is complete, to computer rendersthe contour plot 500 b for presentation to an operator of the polishingapparatus 20, e.g., on a computer monitor. In some implementations, thecomputer color-codes the contour-plot, e.g., by assigning red to thehigher intensity values in the spectra, blue to the lower intensityvalues in the spectra, and intermediate colors (orange through green) tothe intermediate intensity values in the spectra. In otherimplementations, the computer creates a grayscale contour plot byassigning the darkest shade of gray to lower intensity values in thespectra, and the lightest shade of gray to higher intensity values inthe spectra, with intermediate shades for the intermediate intensityvalues in the spectra. Alternatively, the computer can generate a 3-Dcontour plot with the largest z value for higher intensity values in thespectra, and the lowest z value for lower intensity values in thespectra, and intermediate z values for the intermediate values in thespectra. A 3-D contour plot can be, for example, displayed in color,grayscale, or black and white. In some implementations, the operator ofthe polishing apparatus 20 can interact with a 3-D contour plot in orderto view different features of the spectra.

The contour plot 500 b of the reflected light generated from monitoringof the test substrate during polishing can contain, for example,spectral features such as peaks, valleys, spectral zero-crossing points,and inflection points. The features can have characteristics such aswavelengths, widths, and/or intensities. As shown by the contour plot,as the polishing pad 30 removes material from the top surface of the setup substrate, the light reflected off of the set up substrate can changeover time, so feature characteristics change over time.

Prior to polishing of the device substrates, an operator of thepolishing apparatus 20 can view the contour plot and select a featurecharacteristic to track during processing of a batch of substrates thathave similar die features as the set up substrate. For example, thewavelength of a peak 506 can be selected for tracking by the operator ofthe polishing apparatus 20. A potential advantage of the contour plot,particularly a color-coded or 3-D contour plot, is that such a graphicaldisplay makes the selection of a pertinent feature by the user easier,since the features, e.g., features with characteristics that changelinearly with time, are easily visually distinguishable.

In order to select an endpoint criterion, the characteristic of theselected feature can be calculated by linear interpolation based on thepre-polish thickness and the post-polish thickness of the testsubstrate. For example, thicknesses D1 and D2 of the layer on the testsubstrate can be measured pre-polish and post-polish, the values of thecharacteristic can be measured at the time T′ at which the targetthickness D′ is achieved can be calculated fromT′=T1+(T2−T1)*(D2−D′)/(D2−D1), and the value V′ of the characteristiccan be determined from the spectrum measured at time T′. A targetdifference, δV, for the characteristic of the selected feature, such asa specific change in the wavelength of the peak 506, can be determinedfrom V′−V1, where V1 is the initial value (at the time T1). Thus, thetarget difference can be the change from the initial value of thecharacteristic before polishing at time T1 to the value of thecharacteristic at time T′ when polishing is expected to be completed. Anoperator of the polishing apparatus 20 can enter a target difference 604for the feature characteristic to change into a computer associated withthe polishing apparatus 20.

In order to determine the value of V′ which in turn determines the valueof points 602, a robust line fitting can be used to fit a line 508 tothe measured data. The value of line 508 at time T′ minus the value ofline 508 at T0 can be used to determine points 602.

The feature, such as the spectral peak 506, can be selected based oncorrelation between the target difference of the feature characteristicand the amount of material removed from the set up substrate duringpolishing. The operator of the polishing apparatus 20 can select adifferent feature and/or feature characteristic in order to find afeature characteristic with a good correlation between the targetdifference of the characteristic and the amount of material removed fromthe set up substrate.

In other implementations, endpoint selection logic determines thespectral feature to track and the endpoint criterion.

Turning now to the polishing of device substrate, FIG. 6A is an examplegraph 600 a of difference values 602 a-d of a tracked featurecharacteristic during polishing of a device substrate 10. The substrate10 can be part of a batch of substrates being polished where an operatorof the polishing apparatus 20 selected a feature characteristic, such asthe wavelength of a peak or a valley, to track from the contour plot 500b of a set up substrate.

As the substrate 10 is polished, the light detector 52 measures spectrumof light reflected from the substrate 10. The endpoint determinationlogic uses the spectrum of light to determine a sequence of values forthe feature characteristic. The values of the selected featurecharacteristic can change as material is removed from the surface of thesubstrate 10. The difference between the sequence of values of thefeature characteristic and the initial value of the featurecharacteristic is used to determine the difference values 602 a-d.

As the substrate 10 is polished the endpoint determination logic candetermine the current value of the feature characteristic being tracked.In some implementations, when the current value of the feature haschanged from the initial value by the target difference, endpoint can becalled. In some implementations, a line 606 is fit to the differencevalues 602 a-d, e.g., using a robust line fit. A function of the line606 can be determined based on the difference values 602 a-d in order topredict polishing endpoint time. In some implementations, the functionis a linear function of time versus characteristic difference. Thefunction of the line 606, e.g., the slope and intersects, can changeduring polishing of the substrate 10 as new difference values arecalculated. In some implementations, the time at which the line 606reaches the target difference 604 provides an estimated endpoint time608. As the function of the line 606 changes to accommodate newdifference values, the estimated endpoint time 608 can change.

In some implementations, the function of the line 606 is used todetermine the amount of material removed of the substrate 10 and achange in the current value determined by the function is used todetermine when the target difference has been reached and endpoint needsto be called. Line 606 tracks amount of material removed. Alternatively,when removing a specific thickness of material from the substrate 10, achange in the current value determined by the function can be used todetermine the amount of material removed from the top surface of thesubstrate 10 and when to call endpoint. For example, an operator can setthe target difference to be a change in wavelength of the selectedfeature by 50 Nanometers. For example, the change in the wavelength of aselected peak can be used to determine how much material has beenremoved from the top layer of the substrate 10 and when to callendpoint.

At time T0, before polishing of the substrate 10, the characteristicvalue difference of the selected feature is 0. As the polishing pad 30begins to polish the substrate 10 the characteristic values of theidentified feature can change as material is polished off of the topsurface of the substrate 10. For example, during polishing thewavelength of the selected feature characteristic can move to a higheror lower wavelength. Excluding noise effects, the wavelength, and thusthe difference in wavelength, of the feature tends to changemonotonically, and often linearly. At time T′ endpoint determinationlogic determines that the identified feature characteristic has changedby the target difference, δV, and endpoint can be called. For example,when the wavelength of the feature has changed by a target difference of50 Nanometers, endpoint is called and the polishing pad 30 stopspolishing the substrate 10.

When processing a batch of substrates the optical monitoring system can,for example, track the same spectral feature across all of thesubstrates. The spectral feature can be associated with the same diefeature on the substrates. The starting wavelength of the spectralfeature can change from substrate to substrate across the batch based onunderlying variations of the substrates. In some implementations, inorder to minimize variability across multiple substrates, endpointdetermination logic can call endpoint when the selected featurecharacteristic value or a function fit to values of the featurecharacteristic changes by an endpoint metric, EM, instead of the targetdifference. The endpoint determination logic can use an expected initialvalue, EIV, determined from a set up substrate. At time T0 when thefeature characteristic being tracked on the substrate 10 is identified,the endpoint determination logic determines the actual initial value,AIV, for a substrate being processed. The endpoint determination logiccan use an initial value weight, IVW, to reduce the influence of theactual initial value on the endpoint determination while taking intoconsideration variations in substrates across a batch. Substratevariation can include, for example, substrate thickness or the thicknessof underlying structures. The initial value weight can correlate to thesubstrate variations in order to increase uniformity between substrateto substrate processing. The endpoint metric can be, for example,determined by multiplying the initial value weight by the differencebetween the actual initial value and the expected initial value andadding the target difference, e.g., EM=IVW*(AIV−EIV)+δV. In someimplementations, a weighted combination is used to determine endpoint.For example, the endpoint determination logic can calculate an initialvalue of the characteristic from the function and a current value of thecharacteristic from the function, and a first difference between theinitial value and the current value. The endpoint determination logiccan calculate a second difference between the initial value and a targetvalue and generate a weighted combination of the first difference andthe second difference.

FIG. 6B is an example graph 600 b of characteristic measurementdifferences versus time taken at two portions of the substrate 10. Forexample, the optical monitoring system can track one feature locatedtoward an edge portion of the substrate 10 and another feature locatedtoward a center portion of the substrate 10 in order to determine howmuch material has been removed from the substrate 10. When testing a setup substrate, an operator of the polishing apparatus 20 can, forexample, identify two features to track that correspond to differentportions of the set up substrate. In some implementations, the spectralfeatures correspond with the same type of die features on the set upsubstrate. In other implementations, the spectral features areassociated with different types of die features on the set up substrate.As the substrate 10 is being polished, the light detector 52 can measurea sequence of spectra of reflected light from the two portions of thesubstrate 10 that correspond with the selected features of the set upsubstrate. A sequence of values associated with characteristics of thetwo features can be determined by endpoint determination logic. Asequence of first difference values 610 a-b can be calculated for afeature characteristic in a first portion of the substrate 10 bysubtracting the initial characteristic value from the currentcharacteristic value as polishing time progresses. A sequence of seconddifference values 612 a-b can similarly be calculated for a featurecharacteristic in a second portion of the substrate 10.

A first line 614 can be fit to the first difference values 610 a-b and asecond line 616 can be fit to the second difference values 612 a-b. Thefirst line 614 and the second line 616 can be determined by a firstfunction and a second function, respectively, in order to determine anestimated polishing endpoint time 618 or an adjustment to the polishingrate 620 of the substrate 10. During polishing, an endpoint calculationbased on a target difference 622 is made at time TC with the firstfunction for the first portion of the substrate 10 and with the secondfunction for the second portion of the substrate. If the estimatedendpoint time for the first portion of the substrate and the secondportion of the substrate differ (e.g., the first portion will reach thetarget thickness before the second portion) an adjustment to thepolishing rate 620 can be made so that the first function and the secondfunction will have the same endpoint time 618. In some implementations,the polishing rate of both the first portion and the second portion ofthe substrate is adjusted so that endpoint is reached at both portionssimultaneously. Alternatively, the polishing rate of either the firstportion or the second portion can be adjusted.

The polishing rates can be adjusted by, for example, increasing ordecreasing the pressure in a corresponding region of the carrier head70. The change in polishing rate can be assumed to be directlyproportional to the change in pressure, e.g., a simple Prestonian model.For example, when the first portion of the substrate 10 is projected toreach the target thickness at a time TA, and the system has establisheda target time TT, the carrier head pressure in the corresponding regionbefore time T2 can be multiplied by TT/TA to provide the carrier headpressure after time T2. Additionally, a control model for polishing thesubstrates can be developed that takes into account the influences ofplaten or head rotational speed, second order effects of different headpressure combinations, the polishing temperature, slurry flow, or otherparameters that affect the polishing rate. At a subsequent time duringthe polishing process, the rates can again be adjusted, if appropriate.

FIG. 7 shows a method 700 for selecting a target difference δV to usewhen determining the endpoint for the polishing process. Properties of asubstrate with the same pattern as the product substrate are measured(step 702). The substrate which is measured is referred to in theinstant specification as a “set-up” substrate. The set-up substrate cansimply be a substrate which is similar to or the same as the productsubstrate, or the set-up substrate can be one substrate from a batch ofproduct substrates. The properties that are measured can include apre-polished thickness of a film of interest at a particular location ofinterest on the substrate. Typically, the thicknesses at multiplelocations are measured. The locations are usually selected so that asame type of die feature is measured for each location. Measurement canbe performed at a metrology station. The in-situ optical monitoringsystem can measure a spectrum of light reflected off of the substratebefore polishing.

The set-up substrate is polished in accordance with a polishing step ofinterest and the spectra obtained during polishing are collected (step704). Polishing and spectral collection can be performed at the abovedescribed-polishing apparatus. The spectra are collected by the in-situmonitoring system during polishing. The substrate is overpolished, i.e.,polished past an estimated endpoint, so that the spectrum of the lightthat is reflected from the substrate when the target thickness isachieved can be obtained.

Properties of the overpolished substrate are measured (step 706). Theproperties include post-polished thicknesses of the film of interest atthe particular location or locations used for the pre-polishmeasurement.

The measured thicknesses and the collected spectra are used to select,by examining the collected spectra, a particular feature, such as a peakor a valley, to monitor during polishing (step 708). The feature can beselected by an operator of the polishing apparatus or the selection ofthe feature can be automated (e.g., based on conventional peak-findingalgorithms and an empirical peak-selection formula). For example, theoperator of the polishing apparatus 20 can be presented with the contourplot 500 b and the operator can select a feature to track from thecontour plot 500 b as described above with reference to FIG. 5B. If aparticular region of the spectrum is expected to contain a feature thatis desirable to monitor during polishing (e.g., due to past experienceor calculations of feature behavior based on theory), only features inthat region need be considered. A feature is typically selected thatexhibits a correlation between the amount of material removed from thetop of the set-up substrate as the substrate is polished.

Linear interpolation can be performed using the measured pre-polish filmthickness and post-polish substrate thickness to determine anapproximate time that the target film thickness was achieved. Theapproximate time can be compared to the spectra contour plot in order todetermine the endpoint value of the selected feature characteristic. Thedifference between the endpoint value and the initial value of thefeature characteristic can be used as a target difference. In someimplementations, a function is fit to the values of the featurecharacteristic in order to normalize the values of the featurecharacteristic. The difference between the endpoint value of thefunction and the initial value of the function can be used as the targetdifference. The same feature is monitored during the polishing of therest of the batch of substrates.

Optionally, the spectra are processed to enhance accuracy and/orprecision. The spectra can be processed, for example: to normalize themto a common reference, to average them, and/or to filter noise fromthem. In one implementation, a low-pass filter is applied to the spectrato reduce or eliminate abrupt spikes.

The spectral feature to monitor typically is empirically selected forparticular endpoint determination logic so that the target thickness isachieved when the computer device calls an endpoint by applying theparticular feature-based endpoint logic. The endpoint determinationlogic uses the target difference in feature characteristic to determinewhen an endpoint should be called. The change in characteristic can bemeasured relative to the initial characteristic value of the featurewhen polishing begins. Alternatively, the endpoint can be calledrelative to an expected initial value, EIV, and an actual initial value,AIV, in addition to the target difference, δV. The endpoint logic canmultiply the difference between the actual initial value and theexpected initial value by a start value weight, SVW, in order tocompensate for underlying variations from substrate to substrate. Forexample, the endpoint determination logic can end polishing when anendpoint metric, EM=SVW*(AIV−EIV)+δV. In some implementations, aweighted combination is used to determine endpoint. For example, theendpoint determination logic can calculate an initial value of thecharacteristic from the function and a current value of thecharacteristic from the function, and a first difference between theinitial value and the current value. The endpoint determination logiccan calculate a second difference between the initial value and a targetvalue and generate a weighted combination of the first difference andthe second difference. Endpoint can be called with the weighted valuereaches a target value. The endpoint determination logic can determinewhen an endpoint should be called by comparing the monitored difference(or differences) to a target difference of the characteristic. If themonitored difference matches or is beyond the target difference, anendpoint is called. In one implementation the monitored difference mustmatch or exceed the target difference for some period of time (e.g., tworevolutions of the platen) before an endpoint is called.

FIG. 8 shows a method 801 for choosing target values of characteristicsassociated with the selected spectral feature for a particular targetthickness and particular endpoint determination logic. A set-upsubstrate is measured and polished as described above in steps 702-706(step 803). In particular, spectra are collected and the time at whicheach collected spectrum is measured is stored.

A polishing rate of the polishing apparatus for the particular set-upsubstrate is calculated (step 805). The average polishing rate PR can becalculated by using the pre- and post-polished thicknesses T1, T2, andthe actual polish time, PT, e.g., PR=(T2−T1)/PT.

An endpoint time is calculated for the particular set-up substrate (step807) to provide a calibration point to determine target values of thecharacteristics of the selected feature, as discussed below. Theendpoint time can be calculated based on the calculated polish rate PR,the pre-polish starting thickness of the film of interest, ST, and thetarget thickness of the film of interest, TT. The endpoint time can becalculated as a simple linear interpolation, assuming that the polishingrate is constant through the polishing process, e.g., ET=(ST−TT)/PR.

Optionally, the calculated endpoint time can be evaluated by polishinganother substrate of the batch of patterned substrates, stoppingpolishing at the calculated endpoint time, and measuring the thicknessof the film of interest. If the thickness is within a satisfactory rangeof the target thickness, then the calculated endpoint time issatisfactory. Otherwise, the calculated endpoint time can bere-calculated.

Target characteristic values for the selected feature are recorded fromthe spectrum collected from the set-up substrate at the calculatedendpoint time (step 809). If the parameters of interest involve a changein the selected feature's location or width, that information can bedetermined by examining the spectra collected during the period of timethat preceded the calculated endpoint time. The difference between theinitial values and the target values of the characteristics are recordedas the target differences for the feature. In some implementations, asingle target difference is recorded.

FIG. 9 shows a method 900 for using peak-based endpoint determinationlogic to determine an endpoint of a polishing step. Another substrate ofthe batch of patterned substrates is polished using the above-describedpolishing apparatus (step 902). At each revolution of the platen, thefollowing steps are performed.

One or more spectra of light reflecting off a substrate surface beingpolished are measured to obtain one or more current spectra for acurrent platen revolution (step 904). The one or more spectra measuredfor the current platen revolution are optionally processed to enhanceaccuracy and/or precision as described above in reference to FIG. 7. Ifonly one spectrum is measured, then the one spectrum is used as thecurrent spectrum. If more than one current spectrum is measured for aplaten revolution, then they are grouped, averaged within each group,and the averages are designated to be current spectra. The spectra canbe grouped by radial distance from the center of the substrate. By wayof example, a first current spectrum can be obtained from spectrameasured at points 202 and 210 (FIG. 2), a second current spectrum canbe obtained from spectra measured at points 203 and 209, a third currentspectra can be obtained from spectra measured at points 204 and 208, andso on. The characteristic values of the selected spectral peak can bedetermined for each current spectrum, and polishing can be monitoredseparately in each region of the substrate. Alternatively, worst-casevalues for the characteristics of the selected spectral peak can bedetermined from the current spectra and used by the endpointdetermination logic. During each revolution of the platen, an additionalspectrum or spectra are added to the sequence of spectra for the currentsubstrate. As polishing progresses at least some of the spectra in thesequence differ due to material being removed from the substrate duringpolishing.

Current characteristic values for the selected peak are extracted fromthe current spectra (step 906), and the current characteristic valuesare compared to the target characteristic values (step 908) using theendpoint determination logic discussed above in the context of FIG. 7.For example, a sequence of values for the current feature characteristicis determined from the sequence of spectra and a function is fit to thesequence of values. The function can be, for example, a linear functionthat can approximate the amount of material removed from the substrateduring polishing based on the difference between the currentcharacteristic value and the initial characteristic value. As long asthe endpoint determination logic determines that the endpoint conditionhas not been met (“no” branch of step 910), polishing is allowed tocontinue, and steps 904, 906, 908, and 910 are repeated as appropriate.For example, endpoint determination logic determines, based on thefunction, that the target difference for the feature characteristic hasnot yet been reached. In some implementations, when spectra of reflectedlight from multiple portions of the substrate are measured, the endpointdetermination logic can determine that the polishing rate of one or moreportions of the substrate needs to be adjusted so that polishing of themultiple portions is completed at, or closer to the same time. When theendpoint determination logic determines that the endpoint condition hasbeen met (“yes” branch of step 910), an endpoint is called, andpolishing is stopped (step 912).

Spectra can be normalized to remove or reduce the influence of undesiredlight reflections. Light reflections contributed by media other than thefilm or films of interest include light reflections from the polishingpad window and from the base silicon layer of the substrate.Contributions from the window can be estimated by measuring the spectrumof light received by the in-situ monitoring system under a darkcondition (i.e., when no substrates are placed over the in-situmonitoring system). Contributions from the silicon layer can beestimated by measuring the spectrum of light reflecting of a baresilicon substrate. The contributions are usually obtained prior tocommencement of the polishing step. A measured raw spectrum isnormalized as follows:normalized spectrum=(A−Dark)/(Si−Dark)where A is the raw spectrum, Dark is the spectrum obtained under thedark condition, and Si is the spectrum obtained from the bare siliconsubstrate.

In the described embodiment, the change of a wavelength peak in thespectrum is used to perform endpoint detection. The change of awavelength valley in the spectrum (that is, local minima) also can beused, either instead of the peak or in conjunction with the peak. Thechange of multiple peaks (or valleys) also can be used when detectingthe endpoint. For example, each peak can be monitored individually, andan endpoint can be called when a change of a majority of the peaks meetan endpoint condition. In other implementations, the change of aninflection point or an spectral zero-crossing can be used to determineendpoint detection.

Embodiments of the invention and all of the functional operationsdescribed in this specification can be implemented in digital electroniccircuitry, or in computer software, firmware, or hardware, including thestructural means disclosed in this specification and structuralequivalents thereof, or in combinations of them. Embodiments of theinvention can be implemented as one or more computer program products,i.e., one or more computer programs tangibly embodied in an informationcarrier, e.g., in a machine-readable storage device or in a propagatedsignal, for execution by, or to control the operation of, dataprocessing apparatus, e.g., a programmable processor, a computer, ormultiple processors or computers. A computer program (also known as aprogram, software, software application, or code) can be written in anyform of programming language, including compiled or interpretedlanguages, and it can be deployed in any form, including as astand-alone program or as a module, component, subroutine, or other unitsuitable for use in a computing environment. A computer program does notnecessarily correspond to a file. A program can be stored in a portionof a file that holds other programs or data, in a single file dedicatedto the program in question, or in multiple coordinated files (e.g.,files that store one or more modules, sub-programs, or portions ofcode). A computer program can be deployed to be executed on one computeror on multiple computers at one site or distributed across multiplesites and interconnected by a communication network.

The processes and logic flows described in this specification can beperformed by one or more programmable processors executing one or morecomputer programs to perform functions by operating on input data andgenerating output. The processes and logic flows can also be performedby, and apparatus can also be implemented as, special purpose logiccircuitry, e.g., an FPGA (field programmable gate array) or an ASIC(application-specific integrated circuit).

The above described polishing apparatus and methods can be applied in avariety of polishing systems. Either the polishing pad, or the carrierhead, or both can move to provide relative motion between the polishingsurface and the substrate. For example, the platen may orbit rather thanrotate. The polishing pad can be a circular (or some other shape) padsecured to the platen. Some aspects of the endpoint detection system maybe applicable to linear polishing systems, e.g., where the polishing padis a continuous or a reel-to-reel belt that moves linearly. Thepolishing layer can be a standard (for example, polyurethane with orwithout fillers) polishing material, a soft material, or afixed-abrasive material. Terms of relative positioning are used; itshould be understood that the polishing surface and substrate can beheld in a vertical orientation or some other orientation.

Particular embodiments of the invention have been described. Otherembodiments are within the scope of the following claims. For example,the actions recited in the claims can be performed in a different orderand still achieve desirable results.

What is claimed is:
 1. A method to assist in selecting a spectralfeature and a characteristic of the selected spectral feature to monitorduring polishing, comprising: polishing a test substrate; measuring asequence of spectra of light reflected from the substrate while thesubstrate is being polished with an in-situ monitoring system, at leastsome of the spectra of the sequence differing due to material beingremoved during the polishing; receiving the measurements of the sequenceof spectra from the in-situ monitoring system in a computer; andvisually displaying the sequence of spectra as a contour plot of thespectra having intensity values of the spectra as a function ofwavelength within a spectrum along a first axis and as a function of ameasurement time of the spectrum within the sequence of spectra along asecond axis on a computer monitor by the computer.
 2. The method ofclaim 1, wherein the contour plot comprises color coding of intensityvalues.
 3. The method of claim 1, wherein the contour plot comprises a3-D plot of intensity values.
 4. The method of claim 2, wherein colorcoding comprises assigning red to higher intensity values in thespectra, blue to lower intensity values in the spectrum, andintermediate colors to intermediate intensity values in the spectra. 5.The method of claim 1, wherein the contour plot comprises a greyscalecoding of intensity values.
 6. The method of claim 1, comprising, whilethe contour plot is visually displayed on the computer monitor,receiving a selection of a feature of a spectrum and a characteristic ofthe feature to track during polishing of a device substrate.
 7. Themethod of claim 6, further comprising: polishing the device substrate;measuring a second sequence of spectra of light reflected from thedevice substrate while the device substrate is being polished, at leastsome of the spectra of the second sequence differing due to materialbeing removed during the polishing; determining a value of acharacteristic of the selected spectral feature for each of the spectrain the sequence of spectra to generate a sequence of values for thecharacteristic; and determining at least one of a polishing endpoint oran adjustment for a polishing rate based on the sequence of values.
 8. Anon-transitory computer program product for assisting in selecting aspectral feature and a characteristic of the selected spectral featureto monitor during polishing, the computer program product comprisinginstructions to cause a processor to: during polishing of a testsubstrate, receive from an in-situ monitoring system measurements of asequence of spectra of light reflected from the test substrate, at leastsome of the spectra of the sequence differing due to material beingremoved during the polishing; cause a computer monitor to visuallydisplay the sequence of spectra as a contour plot of the spectra havingintensity values of the spectra as a function of wavelength within aspectrum along a first axis and as a function of a measurement time ofthe spectrum within the sequence of spectra along a second axis on acomputer monitor by the computer.
 9. The computer program product ofclaim 8, wherein the contour plot is color coded by intensity values ofthe spectra.
 10. The computer program product of claim 9, whereininstructions to display the sequence of spectra as a contour plotcomprise instructions to color code by assigning red to higher intensityvalues in the spectra, blue to lower intensity values in the spectrum,and intermediate colors to intermediate intensity values in the spectra.11. The computer program product of claim 8, wherein the contour plotcomprises a 3-D plot of intensity values.
 12. The computer programproduct of claim 8, wherein the contour plot is a greyscale coding ofintensity values.
 13. The computer program product of claim 8,comprising instructions to receive a selection of a feature of aspectrum and a characteristic of the feature to track during polishingof a device substrate while the contour plot is visually displayed onthe computer monitor.
 14. The computer program product of claim 13,comprising instructions to: during polishing of the device substrate,receive from an in-situ monitoring system measurements of a secondsequence of spectra of light reflected from the device substrate whilethe device substrate is being polished, at least some of the spectra ofthe second sequence differing due to material being removed during thepolishing; determine a value of a characteristic of the selectedspectral feature for each of the spectra in the sequence of spectra togenerate a sequence of values for the characteristic; and determine atleast one of a polishing endpoint or an adjustment for a polishing ratebased on the sequence of values.